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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating

CVD Ald Atomic Layer Deposition System for Powder Coating Plating

Customization: Available
After-sales Service: Onlin
Warranty: 1
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Product Description

Basic Info
Model NO.
CY-ALD
Type
Coating Production Line
Coating
Vacuum Coating
Certification
CE
Condition
New
Wafer Dimension
8 Inch and Below
Gas Carrier System
N2 or Ar
Production Capacity
200 Sets Per Month
Product Description

CVD ALD Atomic Layer Deposition System

The Thermal Atomic Layer Deposition System is a single-wafer deposition system specially designed for scientific research and small-scale experiments of industrialization. Fully compliant with CE criteria, it is widely utilized in micro-electronics, nano-materials, optical films, and solar batteries.

ALD Films Materials

  • Elementary: Co, Cu, Ta, Ti, W, Ge, Pt, Ru, Ni, Fe...
  • Nitride: TiN, SiN, AlN, TaN, ZrN, HfN, WN ...
  • Oxide: TiO2, HfO2, SiO2, ZnO, ZrO2, Al2O3, SnO2...
  • Others: GaAs, AlP, InP, GaP, InAs, SrTiO3...

Application Fields

  • High-k gate oxides & Capacitor dielectrics
  • Diffusion barriers for Cu interconnects
  • Passivation layers for OLEDs and polymers
  • MEMS applications & Nanoporous coatings
  • Solar battery & Optical thin-film
Technical Parameters
Wafer Dimension8 inch and below
Wafer temperatureRT-400ºC, Precision ±0.1ºC
Number of precursorThree lines (Optional more)
ALD ValveSwagelok ALD swift valve
Background vacuum<5*10-3 Torr
Growing modeConsecutive or interval deposition
Power supply50-60Hz, 220V/20A AC
Heterogeneity<±1%
Instrument Dimension600mm x 600mm x 1100mm
Detailed Photos
ALD System View 1
ALD System View 2
ALD System View 3
ALD System View 4
ALD System View 5
ALD System View 6
Processing Illustration Workshop overview
Quality Control
Delivery Prep
Frequently Asked Questions
● Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high product quality and optimal pricing.
● What is the after-sales service system?
The product warranty period is 12 months with lifetime maintenance. We respond within 24 hours to resolve any technical issues.
● How long is the delivery time?
Stock items take 5-10 days. Customized instruments usually take 30-60 days depending on specific requirements.
● How do you solve power supply differences?
We supply transformers and plugs according to your local requirements and national power standards.
● What are the payment and packaging methods?
We accept T/T, L/C, D/P. Goods are packed in standard export fumigation wooden boxes for safe transport via air, sea, or express.

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