CVD Ald Atomic Layer Deposition System for Powder Coating Plating

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CVD Ald Atomic Layer Deposition System for Powder Coating Plating

Customization:	Available
After-sales Service:	Onlin
Warranty:	1

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Product Description

Basic Info

Model NO.

CY-ALD

Type

Coating Production Line

Coating

Vacuum Coating

Certification

Condition

New

Wafer Dimension

8 Inch and Below

Gas Carrier System

N2 or Ar

Production Capacity

200 Sets Per Month

Product Description

CVD ALD Atomic Layer Deposition System

The Thermal Atomic Layer Deposition System is a single-wafer deposition system specially designed for scientific research and small-scale experiments of industrialization. Fully compliant with CE criteria, it is widely utilized in micro-electronics, nano-materials, optical films, and solar batteries.

ALD Films Materials

Elementary: Co, Cu, Ta, Ti, W, Ge, Pt, Ru, Ni, Fe...
Nitride: TiN, SiN, AlN, TaN, ZrN, HfN, WN ...
Oxide: TiO2, HfO2, SiO2, ZnO, ZrO2, Al2O3, SnO2...
Others: GaAs, AlP, InP, GaP, InAs, SrTiO3...

Application Fields

High-k gate oxides & Capacitor dielectrics
Diffusion barriers for Cu interconnects
Passivation layers for OLEDs and polymers
MEMS applications & Nanoporous coatings
Solar battery & Optical thin-film

Technical Parameters

Wafer Dimension	8 inch and below
Wafer temperature	RT-400ºC, Precision ±0.1ºC
Number of precursor	Three lines (Optional more)
ALD Valve	Swagelok ALD swift valve
Background vacuum	<5*10-3 Torr
Growing mode	Consecutive or interval deposition
Power supply	50-60Hz, 220V/20A AC
Heterogeneity	<±1%
Instrument Dimension	600mm x 600mm x 1100mm

Detailed Photos

Frequently Asked Questions

● Are you a manufacturer or a trading company?

We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high product quality and optimal pricing.

● What is the after-sales service system?

The product warranty period is 12 months with lifetime maintenance. We respond within 24 hours to resolve any technical issues.

● How long is the delivery time?

Stock items take 5-10 days. Customized instruments usually take 30-60 days depending on specific requirements.

● How do you solve power supply differences?

We supply transformers and plugs according to your local requirements and national power standards.

● What are the payment and packaging methods?

We accept T/T, L/C, D/P. Goods are packed in standard export fumigation wooden boxes for safe transport via air, sea, or express.

Product Detail

CVD Ald Atomic Layer Deposition System for Powder Coating Plating