Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

⚙️ Basic Information
Model NO.
MSP300S-3RF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Dia. 185mm
Heating Temp
Max 500℃
Rotate Speed
1-20rpm Adjustable
Chamber Material
Stainless Steel
Package
Wooden Case
Capacity
100 pieces/Month
📦 Packaging & Delivery
Package Size
110.00cm * 100.00cm * 130.00cm
Gross Weight
360.000kg
🔍 Product Description

Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

The three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets available. Customers can choose the target according to the size of the substrate to be coated.

Key Capabilities:

  • Equipped with three 300W RF power supplies for non-metal preparation.
  • Supports multi-layer or multiple coatings.
  • Advanced turbomolecular pump sets with ultimate vacuum up to 1.0E-5Pa.
  • Integrated control system for vacuum pump and sputtering power control.

Applications: This device is ideal for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, and PTFE films. It is an ideal equipment for material film preparation in laboratories due to its small size and easy operation.

📊 Technical Parameters
Sample Stage Size φ185mm Temp Accuracy ±1ºC
Max Heating Max 500ºC Rotate Speed 1-20rpm adjustable
Sputtering Head Quantity 2" × 3 (1", 2" optional) Water Chiller Flow rate of 10L/min
Cooling Mode Water cooling - -
Vacuum Chamber Chamber Size φ300mm × 300mm Watch Window φ100mm
Material Stainless steel Opening Mode Top cover open
Flowmeter Channels 2 channels; measuring range 100sccm (customizable)
Vacuum System Molecular Pump CY-600 Ultimate Vacuum 1.0E-5Pa
Backing Pump Rotary vane pump Measurement Compound vacuum gauge
Pumping Rate Vacuum up to 1.0E-3Pa in 20 minutes
Power Supply AC 220V 50/60Hz
Power Config RF Supply 3 x 300W Total Power 2.5KW
📷 Detailed Photos
🏭 Laboratory & Research

Specializing in the development and production of laboratory technology research equipment since 2005. Our products cover mixing, pressing, burning, cutting, grinding, polishing, and coating analytical equipment. Serving scientific research in labs of universities and colleges worldwide.

❓ Frequently Asked Questions
Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers, have our own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
How is the after-sales service system?
The product warranty period is 12 months, we can provide lifetime maintenance. We have professional departments that can respond within 24 hours to resolve any technical issues.
How long is the delivery time for customized instruments?
If goods are in stock, it is 5-10 days. For customized services, it usually takes 30-60 days depending on the specific requirements.
How do you handle different power supply requirements?
We can supply a transformer and plug according to your local requirements and the power standards of different countries.
What are the available payment methods?
We accept T / T, L / C, D / P, and other secure trade guarantee methods.
How are the goods packaged for delivery?
We use standard export fumigation sign wooden box packaging. Delivery can be via express, air, or sea shipping according to customer requirements.

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